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Effect of AlN Buffer Layer on AlGaN/α-Al
<sub/>2</sub>
O
<sub/>3</sub>
Heteroepitaxial Growth by Metalorganic Vapor Phase Epitaxy

Effect of AlN Buffer Layer on AlGaN/α-Al ₂ O ₃ Heteroepitaxial Growth by Metalorganic Vapor Phase Epitaxy

Koide, Yasuo; Itoh, Nobuo; Itoh, Kenji; Sawaki, Nobuhiko; Akasaki, Isamu

期刊名称Japanese Journal of Applied Physics
作者Koide, Yasuo; Itoh, Nobuo; Itoh, Kenji; Sawaki, Nobuhiko; Akasaki, Isamu
卷第27卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小1589.39KB
发表时间1988-7-20
DOI10.1143/JJAP.27.1156
页码1156-1161

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