RF Plasma CVD Using Hollow Cathode Discharge
- 期刊名称MRS Proceedings
- 作者Araki, Shin; Kamaji, Hideki; Norimoto, Kazuo
- 卷第129卷
- 电子ISSN1946-4274
- 文件大小192.91KB
- 发表时间1988-1
- DOI10.1557/proc-129-539
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