Arsenic Diffusion and Precipitation at AsSG/Si Interface
- 期刊名称MRS Proceedings
- 作者Tsunashima, Yoshitaka; Kashio, Takako; Kawaguchi, Hideichi; Onga, Shinji; Yamabe, Kikuo
- 卷第138卷
- 电子ISSN1946-4274
- 文件大小319.84KB
- 发表时间1988-1
- DOI10.1557/proc-138-569
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