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Characterization of ion-beam- and magnetron- sputtered YBa2Cu3O7−x high Tc superconducting films by secondary neutral mass spectrometry depth profiling

Characterization of ion-beam- and magnetron- sputtered YBa2Cu3O7−x high Tc superconducting films by secondary neutral mass spectrometry depth profiling

C. Mössner; K.-D. Ufert; P. Köpfer; V. Rupertus; H. Oechsner

作者C. Mössner; K.-D. Ufert; P. Köpfer; V. Rupertus; H. Oechsner
卷第174卷
印刷ISSN0040-6090
文件大小409.81KB
发表时间1989
DOI10.1016/0040-6090(89)90899-7
页码255-262

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