Rf oscillations in dc planar sputtering magnetrons: A G Spencer and R P Howson, Vacuum, 38, 1988, 497–498.
- 卷第39卷
- 期第5期
- 印刷ISSN0042-207X
- 文件大小311.38KB
- 发表时间1989
- DOI10.1016/0042-207x(89)90329-1
- 页码495-496
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