Protuberance growth at polysilicon surfaces during oxidation

• 作者Soichi Nadahara; Jun-ichi Shiozawa; Keitaro Imai; Kyoichi Suguro; Kikuo Yamabe
• 印刷ISSN0169-4332
• 文件大小437.47KB
• 发表时间1989
• DOI10.1016/0169-4332(89)90096-2
• 页码425-428