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[IEEE Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (12-13 June 1989)] Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Metalization process parasitic reduction by structure modeling

[IEEE Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (12-13 June 1989)] Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Metalization process parasitic reduction by structure modeling

Poenisch, P.A.

作者Poenisch, P.A.
文件大小92.03KB
发表时间1989
DOI10.1109/vmic.1989.78044

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