[IEEE International Symposium on VLSI Technology, Systems and Applications - Taipei, Taiwan (17-19 May 1989)] International Symposium on VLSI Technology, Systems and Applications - High temperature alloy and contact annealing with RTA on AlSi/TiW metallization
Chou, H.M.; Su, W.-D.; Liou, J.C.; Tuan, H.C.
- 作者Chou, H.M.; Su, W.-D.; Liou, J.C.; Tuan, H.C.
- 文件大小235.25KB
- 发表时间1989
- DOI10.1109/vtsa.1989.68584
- 页码68-70