Substituent positional variations and the lithographic properties of poly(methylstyrene-CO-chloromethylstyrene) resist systems
- 期刊名称Makromolekulare Chemie. Macromolecular Symposia
- 作者Griffiths, Llŷr G.; Jones, Richard G.; Brambley, David R.; Tate, Philip Miller
- 卷第24卷
- 期第1期
- 印刷ISSN0258-0322
- 文件大小249.93KB
- 发表时间1989-01
- DOI10.1002/masy.19890240120
- 页码201-207
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