In situ spectroscopic ellipsometry: Application to Sb coverage measurement in the monolayer range on Si (111)

• 作者S. Andrieu; F. Ferrieu; F. Arnaud d'Avitaya
• 卷第49卷
• 期第6期
• 印刷ISSN0947-8396
• 电子ISSN1432-0630
• 文件大小367.38KB
• 发表时间1989-12
• DOI10.1007/bf00616999
• 页码719-722