The effect of substrate materials on the microstructure and phases of silicon carbide prepared by chemical vapour deposition (CVD)
Young-Su Park; Myong-Hyon Kim; Jai-Young Lee
- 作者Young-Su Park; Myong-Hyon Kim; Jai-Young Lee
- 卷第8卷
- 期第3期
- 印刷ISSN0261-8028
- 电子ISSN1573-4811
- 文件大小479.52KB
- 发表时间1989-03
- DOI10.1007/bf00725512
- 页码321-325