Deposition of high-Tc superconducting Y-Ba-Cu-O thin films at low temperatures using a plasma-enhanced organometallic chemical vapor deposition approach
- 作者Jing Zhao; Henry O. Marcy; Lauren M. Tonge; Bruce W. Wessels; Tobin J. Marks; Carl R. Kannewurf
- 卷第74卷
- 期第10期
- 印刷ISSN0038-1098
- 文件大小315.82KB
- 发表时间1990
- DOI10.1016/0038-1098(90)90716-o
- 页码1091-1094
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