A LOCOS process for an electrostatic microfabricated motor
- 作者Lee S. Tavrow; Stephen F. Bart; Jeffrey H. Lang; Martin F. Schlecht
- 卷第23卷
- 印刷ISSN0924-4247
- 文件大小907.80KB
- 发表时间1990
- DOI10.1016/0924-4247(90)87054-m
- 页码893-898
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