Formation of Palladium Silicide and Germanide in the Pd/a-Si/Si., Pd/a-Ge/Si, and Pd/a-GeSi/Si Systems During Thermal Treatment
- 期刊名称MRS Proceedings
- 作者Edelman, F.; Cytermann, C.; Brener, R.; Eizenberg, M.; Weil, R.; Beyer, W.
- 卷第205卷
- 电子ISSN1946-4274
- 文件大小1381.64KB
- 发表时间1990-1
- DOI10.1557/proc-205-281
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