Modeling of Silicon Etching in CF[sub 4]∕O[sub 2] and CF[sub 4]∕H[sub 2] Plasmas
- 期刊名称Journal of The Electrochemical Society
- 作者Venkatesan, Suresh P.
- 卷第137卷
- 期第7期
- 印刷ISSN0013-4651
- 文件大小990.23KB
- 发表时间1990
- DOI10.1149/1.2086928
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