Extrinsic Gettering of Copper in Silicon: Heterogeneous Precipitation on Near-Surface Dislocations
- 期刊名称MRS Proceedings
- 作者Rice, P.M.; Kim, M.J.; Carpenter, R.W.
- 卷第209卷
- 电子ISSN1946-4274
- 文件大小3744.08KB
- 发表时间1990-1
- DOI10.1557/proc-209-385
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