Spectroscopic diagnostics of temperature-controlled trench etching of silicon
Ole Krogh; Robert N. Carlile; Robert N. Nowlin
- 作者Ole Krogh; Robert N. Carlile; Robert N. Nowlin
- 卷第10卷
- 期第2期
- 印刷ISSN0272-4324
- 电子ISSN1572-8986
- 文件大小651.23KB
- 发表时间1990-06
- DOI10.1007/bf01447128
- 页码231-246