ECR (electron cyclotron resonance) plasma for thin film technology
- 期刊名称Pure and Applied Chemistry
- 作者Nakayama, S.
- 卷第62卷
- 期第9期
- 印刷ISSN0033-4545
- 电子ISSN1365-3075
- 文件大小1258.87KB
- 发表时间1990-01-1
- DOI10.1351/pac199062091751
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