[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - A comparison between micromachined pressure sensors using quartz or silicon vibrating beams
- 作者Dufour, M.; Delaye, M.T.; Michel, F.; Danel, J.S.; Diem, B.; Delapierre, G.
- 文件大小368.20KB
- 发表时间1991
- DOI10.1109/SENSOR.1991.148969
- 页码668-671
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