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[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Thermal assembly of polysilicon microstructures

[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Thermal assembly of polysilicon microstructures

Fedder, G.K.; Howe, R.T.

作者Fedder, G.K.; Howe, R.T.
文件大小712.41KB
发表时间1991
DOI10.1109/memsys.1991.114770
页码63-68

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