Vibrational and rotational excitation in a capacitively coupled 13.56 MHz radio frequency CF4 plasma studied by infrared absorption spectroscopy

• 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
• 作者Haverlag, M.
• 卷第9卷
• 期第2期
• 印刷ISSN0734-2101
• 文件大小616.48KB
• 发表时间1991-3
• DOI10.1116/1.577509