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[IEEE IEEE 1991 Ultrasonics Symposium - Orlando, FL, USA (8-11 Dec. 1991)] IEEE 1991 Ultrasonics Symposium - The elastic properties of PECVD silicon oxynitride films on gallium arsenide

[IEEE IEEE 1991 Ultrasonics Symposium - Orlando, FL, USA (8-11 Dec. 1991)] IEEE 1991 Ultrasonics Symposium - The elastic properties of PECVD silicon oxynitride films on gallium arsenide

Hickernell, T.S.; Hickernell, F.S.
  • 作者Hickernell, T.S.; Hickernell, F.S.
  • 文件大小307.48KB
  • 发表时间1991
  • DOI10.1109/ultsym.1991.234126
  • 页码51-54
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