SPIE Proceedings [SPIE San Diego '90, 8-13 July - San Diego, CA (Sunday 8 July 1990)] Advanced X-Ray/EUV Radiation Sources and Applications - Experimental and analytical studies on fixed mask assembly for APS with enhanced cooling

Kuzay, Tuncer M.; Collins, Jeffrey T.; Khounsary, Ali M.; Viccaro, P. J.; Knauer, James P.; Shenoy, Gopal K.

作者Kuzay, Tuncer M.; Collins, Jeffrey T.; Khounsary, Ali M.; Viccaro, P. J.; Knauer, James P.; Shenoy, Gopal K.
卷第1345卷
印刷ISSN0277-786X
文件大小569.58KB
发表时间1991
DOI10.1117/12.23302
页码55-70

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