Optical emission diagnostics of laser-induced plasma for diamond-like film deposition
X. Chen; J. Mazumder; A. Purohit
- 作者X. Chen; J. Mazumder; A. Purohit
- 卷第52卷
- 期第5期
- 印刷ISSN0947-8396
- 电子ISSN1432-0630
- 文件大小704.36KB
- 发表时间1991-05
- DOI10.1007/bf00324774
- 页码328-334