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[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Single crystal silicon rotational micromotors

[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Single crystal silicon rotational micromotors

Suzuki, K.; Tanigawa, H.

作者Suzuki, K.; Tanigawa, H.
文件大小546.05KB
发表时间1991
DOI10.1109/memsys.1991.114762
页码15-20

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