High-mobility poly-Si TFT's fabricated by a novel excimer laser crystallization method
Shimizu, K.; Sugiura, O.; Matsumura, M.
- 作者Shimizu, K.; Sugiura, O.; Matsumura, M.
- 卷第39卷
- 期第11期
- 印刷ISSN0018-9383
- 电子ISSN1557-9646
- 文件大小265.95KB
- 发表时间1992
- DOI10.1109/16.163532
- 页码2664-2665