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Optically monitoring and controlling epitaxial growth

Optically monitoring and controlling epitaxial growth

D.E. Aspnes; R. Bhat; C. Caneau; E. Colas; L.T. Florez; S. Gregory; J.P. Harbison; I. Kamiya; D.E. Aspnes; R. Bhat; C. Caneau; E. Colas; L.T. Florez; S. Gregory; J.P. Harbison; I. Kamiya; V.G. Keramidas; M.A. Koza; M.A.A. Pudensi; W.E. Quinn; S.A. Schwarz; M.C. Tamargo; H. Tanaka
  • 作者D.E. Aspnes; R. Bhat; C. Caneau; E. Colas; L.T. Florez; S. Gregory; J.P. Harbison; I. Kamiya; D.E. Aspnes; R. Bhat; C. Caneau; E. Colas; L.T. Florez; S. Gregory; J.P. Harbison; I. Kamiya; V.G. Keramidas; M.A. Koza; M.A.A. Pudensi; W.E. Quinn; S.A. Schwarz; M.C. Tamargo; H. Tanaka
  • 卷第120卷
  • 印刷ISSN0022-0248
  • 文件大小596.86KB
  • 发表时间1992
  • DOI10.1016/0022-0248(92)90366-q
  • 页码71-77
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