![[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition]()
[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor depositionYoshida, S.; Kobayashi, T.; Kumano, M.; Esashi, M. · 2011