Formed insulator thin films in non-heated cathodes
Yankelevich, Y.; Barengolz, Yu.; Khaskelberg, M.
- 期刊名称International Journal of Electronics
- 作者Yankelevich, Y.; Barengolz, Yu.; Khaskelberg, M.
- 卷第73卷
- 期第5期
- 印刷ISSN0020-7217
- 文件大小89.96KB
- 发表时间1992-11-1
- DOI10.1080/00207219208925728
- 页码873-874