Interaction of reactively sputtered TaOx thin films with In-Sn-O thin films and properties of TaOx thin films
- 期刊名称Journal of Applied Physics
- 作者Oshio, Shozo; Yamamoto, Makoto; Kuwata, Jun; Matsuoka, Tomizo
- 卷第71卷
- 期第7期
- 印刷ISSN0021-8979
- 文件大小1106.31KB
- 发表时间1992
- DOI10.1063/1.350948
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