NUMERICAL SIMULATION OF THE THERMAL OXIDATION OF SILICON
- 期刊名称COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
- 作者Gadiyak, G.V.; Korobitsina, J.L.; Kranarenko, V.I.
- 卷第11卷
- 期第4期
- 印刷ISSN0332-1649
- 文件大小434.44KB
- 发表时间1992-04
- DOI10.1108/eb010103
- 页码419-431
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