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Dependence of the Growth of Al2O3 Films on the Growth Conditions in the ALE-Like Process

Dependence of the Growth of Al2O3 Films on the Growth Conditions in the ALE-Like Process

Fan, Jia-Fa; Toyoda, Koichi
  • 期刊名称MRS Proceedings
  • 作者Fan, Jia-Fa; Toyoda, Koichi
  • 卷第284卷
  • 电子ISSN1946-4274
  • 文件大小1078.26KB
  • 发表时间1992-1
  • DOI10.1557/proc-284-517
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