Effects of rotation and ion incidence angle on sputter depth resolution in thin films of NiFe/Ta
- 作者Matthias M. Henneberg; Daryl J. Pocker; Michael A. Parker
- 卷第19卷
- 印刷ISSN0142-2421
- 电子ISSN1096-9918
- 文件大小1008.27KB
- 发表时间1992
- DOI10.1002/sia.740190113
- 页码55-59