SPIE Proceedings [SPIE Process Module Metrology, Control and Clustering - San Jose, United States (Wednesday 11 September 1991)] Process Module Metrology, Control and Clustering - Dynamic design processing of integrated circuits for an "on target" end product
Sitte, Renate; Dimitrijev, Sima; Harrison, H. Barry; Davis, Cecil J.; Herman, Irving P.; Turner, Terry R.
- 作者Sitte, Renate; Dimitrijev, Sima; Harrison, H. Barry; Davis, Cecil J.; Herman, Irving P.; Turner, Terry R.
- 卷第1594卷
- 印刷ISSN0277-786X
- 文件大小288.46KB
- 发表时间1992
- DOI10.1117/12.56624
- 页码92-97