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Glove Permeation by Propylene Glycol Monomethyl Ether Acetate — A Photoresist Solvent Used in Semiconductor Device Processing

Glove Permeation by Propylene Glycol Monomethyl Ether Acetate — A Photoresist Solvent Used in Semiconductor Device Processing

Zellers, Edward T.; Sulewski, Robert
  • 期刊名称Applied Occupational and Environmental Hygiene
  • 作者Zellers, Edward T.; Sulewski, Robert
  • 卷第7卷
  • 期第6期
  • 印刷ISSN1047-322X
  • 电子ISSN1521-0898
  • 文件大小791.01KB
  • 发表时间1992-06
  • DOI10.1080/1047322x.1992.10390177
  • 页码392-397
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