Pattern replication accuracy in 1 : 1 SR lithography
- 作者T. Tanaka; M. Futagami; M. Morigami; K. Okada; S. Fujiwara; Y. Yamaoka; M. Harada; K. Kaneda; J. Nishino; S. Suzuki
- 卷第21卷
- 印刷ISSN0167-9317
- 文件大小396.47KB
- 发表时间1993
- DOI10.1016/0167-9317(93)90029-5
- 页码71-74
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