On-line detection and monitoring of plasma etch damage to semi-insulating GaAs
P.A.F. Herbert; M. Murtagh; P.V. Kelly; G.M. Crean; W.M. Kelly
- 作者P.A.F. Herbert; M. Murtagh; P.V. Kelly; G.M. Crean; W.M. Kelly
- 卷第21卷
- 印刷ISSN0167-9317
- 文件大小456.71KB
- 发表时间1993
- DOI10.1016/0167-9317(93)90081-f
- 页码315-320