Diffusion phenomena in Sb-implanted silicon
- 期刊名称Radiation Effects and Defects in Solids
- 作者Antoncik, E.
- 卷第125卷
- 期第4期
- 印刷ISSN1042-0150
- 电子ISSN1029-4953
- 文件大小637.92KB
- 发表时间1993-03
- DOI10.1080/10420159308220212
- 页码355-363
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