Piezoelectric and Capacitative Microactuators and Devices
Sayer, M.; Barrow, D.; Zou, L.; Kumar, C.V.R. Vasant; Noteboom, R.; Knapik, D.A.; Schindel, D.W.; Hutchins, D.A.
- 期刊名称MRS Proceedings
- 作者Sayer, M.; Barrow, D.; Zou, L.; Kumar, C.V.R. Vasant; Noteboom, R.; Knapik, D.A.; Schindel, D.W.; Hutchins, D.A.
- 卷第310卷
- 电子ISSN1946-4274
- 文件大小2784.56KB
- 发表时间1993-1
- DOI10.1557/proc-310-37