Growth of Silicon Films Onto Fluororesin Surface by ArF Excimer Laser
- 期刊名称MRS Proceedings
- 作者Miyokawa, T.; Okoshi, M.; Toyoda, K.; Murahara, M.
- 卷第334卷
- 电子ISSN1946-4274
- 文件大小680.66KB
- 发表时间1993-1
- DOI10.1557/proc-334-87
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