SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - Graded-period multilayer structures for X-ray optics
Biltoft, Peter J.; Falabella, Steven; Pombo, Ralph F.; Noble, Edward H.; Hoover, Richard B.; Walker II, Arthur B. C.
- 作者Biltoft, Peter J.; Falabella, Steven; Pombo, Ralph F.; Noble, Edward H.; Hoover, Richard B.; Walker II, Arthur B. C.
- 卷第1742卷
- 印刷ISSN0277-786X
- 文件大小303.29KB
- 发表时间1993
- DOI10.1117/12.140564
- 页码304-308