SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Submicrometer Metallization: Challenges, Opportunities, and Limitations - Smart-power metallization: issues, challenges, and opportunities (Abstract Only)
Shenai, Krishna; Kwok, Thomas; Kikkawa, Takamaro; Shenai, Krishna
- 作者Shenai, Krishna; Kwok, Thomas; Kikkawa, Takamaro; Shenai, Krishna
- 卷第1805卷
- 印刷ISSN0277-786X
- 文件大小28.80KB
- 发表时间1993
- DOI10.1117/12.145458
- 页码52-52