Reflection of KrF laser radiation from silicon surfaces with various coatings
- 作者V. S. Barabanov; V. L. Kantsyrev; N. V. Morozov; P. B. Sergeev; M. A. Tyunina
- 卷第14卷
- 期第6期
- 印刷ISSN1071-2836
- 电子ISSN1573-8760
- 文件大小312.19KB
- 发表时间1993-1112
- DOI10.1007/bf01121884
- 页码421-425
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