Structural Change In a Inorganic Resist From Peroxopolytungstic Acid During Deep-UV Irradiation.
- 期刊名称NIPPON KAGAKU KAISHI
- 作者KISHIMOTO, Akira; MATSUZAKI, Naosuke; HIBINO, Mitsuhiro; KUDO, Tetsuichi
- 期第9期
- 印刷ISSN0369-4577
- 电子ISSN2185-0925
- 文件大小3618.84KB
- 发表时间1993
- DOI10.1246/nikkashi.1993.1041
- 页码1041-1046
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