A simplified model describing enhanced growth rates during vapor phase selective epitaxy
M. F. Zybura; S. H. Jones; J. M. Duva; J. Durgavich
- 作者M. F. Zybura; S. H. Jones; J. M. Duva; J. Durgavich
- 卷第23卷
- 期第10期
- 印刷ISSN0361-5235
- 电子ISSN1543-186X
- 文件大小676.94KB
- 发表时间1994-10
- DOI10.1007/bf02650375
- 页码1055-1059