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Oxide growth at a Si surface and role of radiation effects

Oxide growth at a Si surface and role of radiation effects

Luca Verdi; Antonio Miotello; Roger Kelly

作者Luca Verdi; Antonio Miotello; Roger Kelly
卷第91卷
印刷ISSN0168-583X
文件大小640.50KB
发表时间1994
DOI10.1016/0168-583x(94)96303-7
页码648-653

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