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Adsorption and decomposition of diethylsilane and diethyldichlorosilane on Si(100)(2 × 1) and Si(111)(1 × 1)

Adsorption and decomposition of diethylsilane and diethyldichlorosilane on Si(100)(2 × 1) and Si(111)(1 × 1)

J. Schmidt; Ch. Stuhlmann; H. Ibach

作者J. Schmidt; Ch. Stuhlmann; H. Ibach
卷第302卷
文件大小1417.15KB
发表时间1994
DOI10.1016/0039-6028(94)91092-8
页码10-24

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