SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Comparison of rapid thermal processing and furnace processing for quarter-micrometer CMOS
El-Kareh, Badih; Ghatalia, Ashwin; Kellam, Mark D.; Maillot, Philippe; Osburn, Carlton M.; Zhang, Xiaoqiang; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.
- 作者El-Kareh, Badih; Ghatalia, Ashwin; Kellam, Mark D.; Maillot, Philippe; Osburn, Carlton M.; Zhang, Xiaoqiang; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.
- 卷第2091卷
- 印刷ISSN0277-786X
- 文件大小665.59KB
- 发表时间1994
- DOI10.1117/12.167352
- 页码36-50