Controlled carbonization of Si(001) surface using hydrocarbon radicals in ultrahigh vacuum
Tomoaki Hatayama; Yoichiro Tarui; Tastuo Yoshinobu; Takashi Fuyuki; Hiroyuki Matsunami
- 作者Tomoaki Hatayama; Yoichiro Tarui; Tastuo Yoshinobu; Takashi Fuyuki; Hiroyuki Matsunami
- 卷第136卷
- 印刷ISSN0022-0248
- 文件大小568.29KB
- 发表时间1994
- DOI10.1016/0022-0248(94)90435-9
- 页码333-337