Spin-on-glass material curing and etching
- 作者Radko Osredkar
- 卷第34卷
- 期第7期
- 印刷ISSN0026-2714
- 文件大小229.22KB
- 发表时间1994
- DOI10.1016/0026-2714(94)90513-4
- 页码1265-1267
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